AeroBar® 5635 MP
Simco-Ion's AeroBar 5635 Modulated Pulse ionizing bar is specifically designed to eliminates static charge in semiconductor and other ultra-clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness, critical for smaller technology nodes.
- ISO 14644-12 (0.01 µm particles) ionization
- ISO 14644 Class 1 (0.1 µm particles) cleanliness
- Modulated pulse technology
- Excellent lateral uniformity
- Low field voltages
- Air-assist capability
- Optional software with easy-to-use interface with wide adjustability
- Alarm output signal
Specifications
Input Voltage 24 VDC ±10% Balance Auto balancing system <±20V over time and across the bar length (measured in a controlled environment at 24” distance) Ion Emission Modulated pulse (MP) technology Emitter Points Single-crystal silicon emitter points Cleanliness Meets ISO 14644-12 ionization (0.01 mm particles or nanoparticles) and ISO 14644 Class 1 (0.1 mm particles) using 45-50% output voltage Dimension 3.1H x 1.3W x 18/24/34/39/45/51/57/63/69/75/81/87/93L in. (78H x 34W x 450/600/850/1000/1150/1300/1450/1600/1750/1900/2050/2200/2350L mm) Accessories
- Signal and Power Junction Box for FMS Connection
- Remote Serial Adapter Kit
- 100-240 VAC to 24 VDC Power Transformer
- 24 VDC Power Converter with Signal and Power Junction Box
- Horizontal Mounting Brackets
- Vertical Mounting Brackets
- Flat Mounting Clips
- M4 Metric Flat Mounting Clip
- Cat-5e with RJ-45 Ethernet Cable
- Eyebolt with Nut
- OpenJet Nozzle Assembly
- IEC Power Cord
Consumables
- Single Crystal Silicon Emitter Points
- Simco-Ion Emitter Point Cleaner
Target Markets
- Front-End Semiconductor Manufacturing
Target Applications
AeroBar 5635 is specifically designed for semiconductor wafer processing and the stringent cleanliness and performance requirements at smaller geometries. It provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness.
Related Products
Power Distribution Box Model 5601