AeroBar® 5635M MP
Simco-Ion’s Model 5635M AeroBar MP ionizing bar is specifically designed to eliminate static charge in semiconductor and other ultra-clean manufacturing processes where fast discharge time, low swing voltages and precision balance are required, but exposed metallic surfaces are not permitted. The Model 5635M utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness, critical for smaller technology nodes.
- ISO 14644-12 (0.01 µm particles) ionization
- ISO 14644 Class 1 (0.1 µm particles) cleanliness
- Modulated pulse technology
- Metal-free design “M”
- Excellent lateral uniformity
- Low field voltages
- Air-assist capability
- Optional software with easy-to-use interface with wide adjustability
- Alarm output signal
Specifications
Input Voltage 24 VDC ±10% Balance Auto balancing system <±20V over time and across the bar length (measured in a controlled environment at 24” distance) Ion Emission Modulated pulse (MP) technology Emitter Points Single-crystal silicon emitter points Cleanliness Meets ISO 14644-12 (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) using 45-50% Enclosure ABS chassis (ground plate – carbon filled ABS) Dimension 3.1H x 1.3W x 18/24/34/39/45/51/57/63/69/75/81/87/93L in. (78H x 34W x 450/600/850/1000/1150/1300/1450/1600/1750/1900/2050/2200/2350L mm) Accessories
- Signal and Power Junction Box for FMS Connection
- Remote Serial Adapter Kit
- 100-240 VAC to 24 VDC Power Transformer
- 24 VDC Power Converter with Signal and Power Junction Box
- Delrin Plastic flat mounting bracket and swivelCat-5e with RJ-45 Ethernet Cable
- OpenJet Nozzle Assembly
- IEC Power Cord
Consumables
- Single Crystal Silicon Emitter Points
- Simco-Ion Emitter Point Cleaner
Related Products
Power Distribution Box Model 5601
Target Markets
- Front-End Semiconductor Manufacturing
Target Applications
AeroBar 5635M is specifically designed for semiconductor wafer processing and the stringent cleanliness and performance requirements at smaller geometries along with environments that need to be metal free. It provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness.