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Nozzle type cleaner "PULSE JET" Line type

Nozzle type cleaner "PULSE JET" Line type

  • Applying ultrasonic pressure to the water stream from the nozzle creates particle acceleration in the water and the water particle motion removes submicron contamination on the objective works.
  • Fresh DI water supply avoids re-contamination within the cleaning media.
  • Cleaning water is supplied in single line form, so the wide material such as LCD glass can be cleaned effectively.
  • High frequency ultrasound (megasonic) is effective for fine particle contamination.
  • Output power control can adjust the power and suitable for delicate object like magnetic head.

  • Usage

    • Cleaning after mirror polishing or before vapor deposition of GaAs wafer
    • Cleaning of LCD glass, HDD media or Si wafers
    • Cleaning for CMP post process

  • Lineup [size]

    • W-357LS-80

      80 mm width type, suitable for small size LCD glass
      Standard nozzle for this model is stainless steel(SUS304)
       
    • W-357LS-160
      180 mm width type.
      Nozzle is made of P.P. and metal ion contamination.
       
    • W-357LS-380
      380 mm width type.
      Nozzle is made of P.P. and metal ion contamination.
       
    • W-357LS-580
      580 mm width type.
      Nozzle is made of P.P. and metal ion contamination.
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